| 000 | 00858nam a22002654a 4500 | ||
|---|---|---|---|
| 999 |
_c54425 _d54425 |
||
| 003 | IN-MiVU | ||
| 005 | 20240626163646.0 | ||
| 007 | ta | ||
| 008 | 010102s2001 nyua|||gr||||Z||1|0|eng | ||
| 020 |
_a9780198084808: _cRs. 525.00/- _q(pbk) |
||
| 040 |
_aMAIN _beng _cIN-MiVU |
||
| 082 | 0 | 4 |
_221st _a621.38 _bCAM/S |
| 100 | 1 |
_aCampbell,Stephen A _eauthor |
|
| 245 | 1 | 0 |
_aThe science and engineering of microelectronic fabrication/ _cby Stephen.A.Campbell |
| 250 | _a2nd ed. | ||
| 260 | 3 |
_aNew York: _bOxford University Press, _c2001 |
|
| 300 |
_axiv,603p.: _bill.,charts; _c24cm. |
||
| 500 | _aState Grants 2016-2017 | ||
| 504 | _aincludes index. | ||
| 650 | 0 | _aMICROELECTRONIC FABRICATION | |
| 650 | 0 | _aSCIENCE AND ENGINEERING | |
| 650 | 0 | _aSCIENCE OF MICROELECTRONIC FABRICATION | |
| 650 | 0 | _aENGINEERING MICROELECTRONIC FABRICATION | |
| 942 |
_cBK _2ddc |
||