000 00974cam a2200373ua 4500
001 48578
005 20171214165907.0
007 ta
008 130830s2004 a g b000 u eng u
020 _a9788126532605
_cRS599.00
040 _aMAIN
041 1 _aeng
_hNULL
082 1 4 _a621.38152
_bMAY/F
100 1 _aMay, Gary S..
245 1 0 _aFundamentals of semiconductor fabrication /
_cGary S.May, Simon M. Sze.
250 _a /
_b.
260 _aNew Delhi :
_bWiley India ,
_cc2004 rep. 2012.
300 _axiii,305p. :
_bfigure ;
_c23cm .
365 _aRS599.00
504 _aincludes appendix and index
653 0 _aSEMICONDUCTOR FABRICATION
653 0 _aETCHING
653 0 _aDIFFUSION
700 1 _aSze, Simon M. .
942 _cBK
999 _c48253
_d48253