| 000 | 00974cam a2200373ua 4500 | ||
|---|---|---|---|
| 001 | 48578 | ||
| 005 | 20171214165907.0 | ||
| 007 | ta | ||
| 008 | 130830s2004 a g b000 u eng u | ||
| 020 |
_a9788126532605 _cRS599.00 |
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| 040 | _aMAIN | ||
| 041 | 1 |
_aeng _hNULL |
|
| 082 | 1 | 4 |
_a621.38152 _bMAY/F |
| 100 | 1 | _aMay, Gary S.. | |
| 245 | 1 | 0 |
_aFundamentals of semiconductor fabrication / _cGary S.May, Simon M. Sze. |
| 250 |
_a / _b. |
||
| 260 |
_aNew Delhi : _bWiley India , _cc2004 rep. 2012. |
||
| 300 |
_axiii,305p. : _bfigure ; _c23cm . |
||
| 365 | _aRS599.00 | ||
| 504 | _aincludes appendix and index | ||
| 653 | 0 | _aSEMICONDUCTOR FABRICATION | |
| 653 | 0 | _aETCHING | |
| 653 | 0 | _aDIFFUSION | |
| 700 | 1 | _aSze, Simon M. . | |
| 942 | _cBK | ||
| 999 |
_c48253 _d48253 |
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