| 000 | 00731nam a22002174a 4500 | ||
|---|---|---|---|
| 999 |
_c43917 _d43917 |
||
| 003 | IN-MiVU | ||
| 005 | 20240528113302.0 | ||
| 008 | 120521s2001 ii a gr b001 0 eng u | ||
| 020 |
_cRs.525.00 _a9780195681444 _q(Pbk) |
||
| 040 |
_aMAIN _beng _cIN-MiVU |
||
| 082 | 0 | 4 |
_221 _a621.38152 _bCAM/S |
| 100 | 1 |
_aCampbell, Stephen A. _eauthor |
|
| 245 | 1 | 0 |
_aThe science and engineering of microelectronic fabrication / _cby Stephen A. Campbell |
| 250 | _a2nd ed. | ||
| 260 | 3 |
_aNew Delhi : _bOxford University Press , _c2001. |
|
| 300 |
_axiv,603p. : _bIlls. ; _c25cm. |
||
| 440 | 0 | _aThe oxford series in electrical and computer engineering | |
| 504 | _aIncludes index. | ||
| 650 | 0 | _aMICROELECTRONIC FABRICATION | |
| 942 |
_cBK _2ddc |
||