| 000 | 00857cam a2200277ua 4500 | ||
|---|---|---|---|
| 001 | 23746 | ||
| 005 | 20171214164242.0 | ||
| 007 | ta | ||
| 008 | 071211s2006 Ne a g b000 u eng u | ||
| 020 |
_a9780471784067 _cUSD 84.95 |
||
| 040 | _aMAIN | ||
| 041 | 1 |
_aeng _hNULL |
|
| 044 | _aNe | ||
| 082 | 1 | 4 |
_a621.38152 _bMAY/F |
| 100 | 1 | _aMay, Gary S. | |
| 245 | 1 | 0 |
_aFundamentals of semiconductor manufacturing and process control / _cGary S. May and Costas J. Spanos. |
| 250 |
_a / _b. |
||
| 260 |
_aNew York : _bJohn Wiley , _c2006. |
||
| 300 |
_axvi,463p. : _bills.,figs., tables ; _c24cm _e1 CD . |
||
| 365 | _aUSD 84.95 | ||
| 504 | _aIncludes bibliographical references and index | ||
| 653 | 0 | _aSEMICONDUCTORS-DESIGN AND CONSTRUCTION | |
| 653 | 0 | _aINTEGRATED CIRCUITS-DESIGN AND CONSTRUCTION | |
| 700 | 1 | _aSpanos, Costas J . | |
| 942 | _cBK | ||
| 999 |
_c23424 _d23424 |
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