TY  - BOOK
AU  - Ghandhi,Sorab K.
TI  - VLSI fabrication principles: silicon and gallium arsenide 
SN  - 9788126517909
U1  - 621.381 21st
PY  - 1994/// [reprinted 2016 ]
CY  - New Delhi
PB  - Wiley Publishing
KW  - INTEGRATED CIRCUITS--VERY LARGE SCALE INTEGRATION
KW  - SILICON
KW  - GALLIUM ARSENIDE
N1  - State Grant 216-2017; It includes bibliographical referrences and index
ER  -