TY  - BOOK
AU  - Campbell,Stephen A
TI  - The science and engineering of microelectronic fabrication
SN  - 9780198084808:
U1  - 621.38  21st
PY  - 2001///
CY  - New York
PB  - Oxford University Press
KW  - MICROELECTRONIC FABRICATION
KW  - SCIENCE AND ENGINEERING
KW  - SCIENCE OF MICROELECTRONIC FABRICATION
KW  - ENGINEERING MICROELECTRONIC FABRICATION
N1  - State Grants 2016-2017; includes index
ER  -