Campbell,Stephen A <br/><br/>
The science and engineering of microelectronic fabrication/ 
by Stephen.A.Campbell 
 - 2nd ed. 
 - New York:  Oxford University Press,  2001 
 - xiv,603p.:  ill.,charts;  24cm. 
<br/><br/> State Grants 2016-2017 
<br/><br/>includes index. 
<br/><br/><label>ISBN: </label>9780198084808:  Rs. 525.00/- 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MICROELECTRONIC FABRICATION<br/>SCIENCE AND ENGINEERING<br/>SCIENCE OF MICROELECTRONIC FABRICATION<br/>ENGINEERING MICROELECTRONIC FABRICATION
<br/><br/><label>Dewey Class. No.: </label>621.38   / CAM/S