May, Gary S..

Fundamentals of semiconductor fabrication / Gary S.May, Simon M. Sze. - / . - New Delhi : Wiley India , c2004 rep. 2012. - xiii,305p. : figure ; 23cm .

includes appendix and index

9788126532605 RS599.00

SEMICONDUCTOR FABRICATION ETCHING DIFFUSION

621.38152 / MAY/F