May, Gary S.. Fundamentals of semiconductor fabrication / Gary S.May, Simon M. Sze. - / . - New Delhi : Wiley India , c2004 rep. 2012. - xiii,305p. : figure ; 23cm . includes appendix and index ISBN: 9788126532605 RS599.00 Subjects--Index Terms: SEMICONDUCTOR FABRICATION ETCHING DIFFUSION Dewey Class. No.: 621.38152 / MAY/F