TY  - BOOK
AU  - Plummer,James D.
AU  - Deal,Michael D  .
AU  - Griffin,Peter B  .
TI  - Silicon VLSI technology : fundamentals, practice and modeling / 
SN  - 9788131726044
U1  - 621.395 
PY  - 2012///
CY  - New Delhi : 
PB  - Pearson Education Asia , 
KW  - SILICON
KW  - SILICON OXIDE FILMS
KW  - SILICON-ON-INSULATOR TECHNOLOGY
N1  - Includes bibliographical references and index
ER  -