TY  - BOOK
AU  - Campbell,Stephen A.
TI  - The science and engineering of microelectronic fabrication / 
SN  - 9780195681444
U1  - 621.38152 21
PY  - 2001///
CY  - New Delhi : 
PB  - Oxford University Press , 
KW  - MICROELECTRONIC FABRICATION
N1  - Includes index
ER  -