Campbell, Stephen A. <br/><br/>
The science and engineering of microelectronic fabrication /  
by Stephen A. Campbell 
 - 2nd ed. 
 - New Delhi :   Oxford University Press ,   2001. 
 - xiv,603p. :   Ills. ;   25cm. 
 - The oxford series in electrical and computer engineering .
<br/><br/>Includes index. 
<br/><br/><label>ISBN: </label>9780195681444  Rs.525.00 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MICROELECTRONIC FABRICATION
<br/><br/><label>Dewey Class. No.: </label>621.38152  / CAM/S