TY  - BOOK
AU  - Ibbs,K.G..
AU  - Osgood,Richard Magee
TI  - Laser chemical processing for microelectronics / 
T2  - Cambridge studies in modern optics no;7, 
SN  - 0521322545
U1  - 621.381 
PY  - 1989///
CY  - Cambridge : 
PB  - Cambridge University Press , 
KW  - LASER-INDUSTRIAL APPLICATIONS
N1  - NULL
ER  -