TY  - BOOK
AU  - Ohring,Milton
TI  - Materials science of thin films: deposition and structure / 
U1  - 621.38152 
PY  - 2006///
CY  - NewDelhi : 
PB  - Elsevier India , 
KW  - THIN FILMS
N1  - Includes bibliographical references and
ER  -