TY  - BOOK
AU  - May,Gary S.
AU  - Spanos,Costas J  .
TI  - Fundamentals of semiconductor manufacturing and process control / 
SN  - 9780471784067
U1  - 621.38152 
PY  - 2006///
CY  - New York : 
PB  - John Wiley , 
KW  - SEMICONDUCTORS-DESIGN AND CONSTRUCTION
KW  - INTEGRATED CIRCUITS-DESIGN AND CONSTRUCTION
N1  - Includes bibliographical references and index
ER  -