May, Gary S. <br/><br/>
Fundamentals of semiconductor manufacturing and process control /  
Gary S. May and Costas J. Spanos. 
 - /   . 
 - New York :   John Wiley ,   2006. 
 - xvi,463p. :   ills.,figs., tables ;   24cm  1 CD .  
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780471784067  USD 84.95 
<br/><br/><label>Subjects--Index Terms: </label>SEMICONDUCTORS-DESIGN AND CONSTRUCTION INTEGRATED CIRCUITS-DESIGN AND CONSTRUCTION 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / MAY/F