| 000 -LEADER |
| fixed length control field |
00857cam a2200277ua 4500 |
| 005 - DATE & TIME |
| control field |
20171214164242.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
| fixed length control field |
071211s2006 Ne a g b000 u eng u |
| 020 ## - ISBN |
| International Standard Book Number |
9780471784067 |
| Price |
USD 84.95 |
| 040 ## - CATALOGING SOURCE |
| Original cataloging agency |
Central Library |
| 041 1# - Language |
| Language |
|
| -- |
NULL |
| 044 ## - |
| -- |
Ne |
| 082 14 - DDC NUMBER |
| Classification number |
621.38152 |
| Book Number |
MAY/F |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
| Personal name |
May, Gary S. |
| 245 10 - TITLE STATEMENT |
| Title |
Fundamentals of semiconductor manufacturing and process control / |
| STMT |
Gary S. May and Costas J. Spanos. |
| 250 ## - EDITION STATEMENT |
| Edition statement |
/ |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
| Place of publication, distribution, etc |
New York : |
| Name of publisher, distributor, etc |
John Wiley , |
| Date of publication, distribution, etc |
2006. |
| 300 ## - PHYSICAL DESCRIPTION |
| Pages |
xvi,463p. : |
| Other Details |
ills.,figs., tables ; |
| Dimension |
24cm |
| 653 #0 - Subject |
| Subject |
SEMICONDUCTORS-DESIGN AND CONSTRUCTION |
| 653 #0 - Subject |
| Subject |
INTEGRATED CIRCUITS-DESIGN AND CONSTRUCTION |
| 700 1# - Added Entry Personal Name |
| Added Entry Personal Name |
Spanos, Costas J . |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
| Koha item type |
Books |
| 250 ## - EDITION STATEMENT |
| -- |
. |
| 300 ## - PHYSICAL DESCRIPTION |
| -- |
1 CD . |
| 365 ## - |
| -- |
USD 84.95 |
| 504 ## - |
| -- |
Includes bibliographical references and index |
| 541 ## - |
| -- |
69655 |
| -- |
USD 84.95 |