Campbell, Stephen A.
The science and engineering of microelectronic fabrication / by Stephen A. Campbell - 2nd ed. - New Delhi : Oxford University Press , 2001. - xiv,603p. : Ills. ; 25cm. - The oxford series in electrical and computer engineering .
Includes index.
9780195681444 Rs.525.00
MICROELECTRONIC FABRICATION
621.38152 / CAM/S
The science and engineering of microelectronic fabrication / by Stephen A. Campbell - 2nd ed. - New Delhi : Oxford University Press , 2001. - xiv,603p. : Ills. ; 25cm. - The oxford series in electrical and computer engineering .
Includes index.
9780195681444 Rs.525.00
MICROELECTRONIC FABRICATION
621.38152 / CAM/S